ExpressLink TM provides complete Transport Module control for atmospheric (EFEM) and vacuum tools. It includes operational and maintenance functions, safety interlocks, exception handling routines, and supports SEMI 300mm standards.

For 300mm Fabs, standards support is critical. ExpressLink TM has been designed from the ground up with support for the SEMI standards. ExpressLink supports E84 AMHS Parallel I/O, E87 Carrier Management and E90 Substrate Management.

For OEMs deciding to develop their own Supervisory Control and GUI, the ExpressLink TM development kit includes for atmospheric tools (EFEM) a powerful COM/CORBA ExpressLink Transport Module Interface (TMI) that allows the OEM a rapid integration to their software.